A precision force banacing accelerometer for ineration navigation application is developed . the resolution , low - sensitivity threshold and high thermal stability are considered as design parameters . in order to guarantee a low - sensitivity threshold while maintaining robustness against shock , push - pull type long flexures are used in this paper . to improve thermal stability , this paper discusses the use of electromagnets as a magnetic fied source . the silicon pendulum assembly and modified inducance type pick - up is also developed to reduce assembling procedure . the measure range of accelerometer is 0 - 70g 加速度計(jì)的分辨率、靈敏度閾值和高的熱穩(wěn)定性是設(shè)計(jì)時(shí)主要考慮的參數(shù)。本論文中使用推?挽式長(zhǎng)撓性結(jié)構(gòu)來保證低靈敏度閾值,同時(shí)保證抗振魯棒性。為了提高熱穩(wěn)定性,本文中討論了利用永久磁鐵作為磁場(chǎng)源;微加工技術(shù)被引入擺組件的結(jié)構(gòu)設(shè)計(jì)和利用力矩線圈作為激勵(lì)線圈來簡(jiǎn)化電感式的檢測(cè)裝置。